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Handbook of chemical vapor deposition (CVD) : principles, technology, and applications

フォーマット:
図書
責任表示:
by Hugh O. Pierson
言語:
英語
出版情報:
Park Ridge, N.J., U.S.A. : Noyes Publications, c1992
形態:
xxii, 436 p. ; 25 cm
著者名:
Pierson, Hugh O. <DA03374539>  
シリーズ名:
Materials science and process technology series <BA04523161>
書誌ID:
BA18879259
ISBN:
9780815513001 [0815513003]
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