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Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.

フォーマット:
図書
責任表示:
editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang
言語:
英語
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1992
形態:
xv, 552 p. ; 24 cm
著者名:
シリーズ名:
Materials Research Society symposium proceedings ; v. 236 <BA00013775>
書誌ID:
BA14185826
ISBN:
9781558991309 [1558991301]
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