Introduction to microlithography : theory, materials, and processing

フォーマット:

図書

責任表示:

L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

言語:

英語

出版情報:

Washington, D.C. : The American Chemical Society, 1983

形態:

ix, 363 p. ; 24 cm

著者名:

• Thompson, L. F., 1944- <DA02745817>
• Willson, C. G. (C. Grant), 1939- <DA02745828>
• Bowden, M. J., 1943- <DA0274584X>
• American Chemical Society. Division of Polymeric Materials : Science and Engineering <DA00125924>
• American Chemical Society. Meeting <DA00033699>

シリーズ名:

ACS symposium series ; 219 <BA00073096>

目次情報:

An introduction to lithography	L.F. Thompson
The lithographic process
The physics	L.F. Thompson and M.J. Bowden
Organic resist materials
Theory and chemistry	C. Grant Willson
Resist processing	L.F. Thompson and M.J. Bowden
Plasma etching	J.A. Mucha and D.W. Hess
Multi-layer resist systems	B.J. Lin

An introduction to lithography	L.F. Thompson
The lithographic process
The physics	L.F. Thompson and M.J. Bowden
Organic resist materials
Theory and chemistry	C. Grant Willson
Resist processing	L.F. Thompson and M.J. Bowden

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書誌ID:

BA04572087

ISBN:

9780841207752 [0841207755]