Journal of vacuum science and technology

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フォーマット:: 雑誌
責任表示:: American Vacuum Society
言語:: 英語
出版情報:: New York : American Institute of Physics
著者名:: American Vacuum Society <DA03926125>
ISSN:: 00225355
巻次年月次:: Vol. 1, no. 1 (1964)-v. 21, no. 4 (1982)
継続後誌:: Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <AA10635106>
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society <AA10635514>
書誌ID:: AA00708677

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詳細

資料形態(詳細):	Text
刊行状態:	Dead status
主題:	Vacuum technology--Periodicals
変遷ファミリーID:	30085200
登録日:	1996-05-02
分類・件名:	LCSH : Vacuum technology -- Periodicals

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